{"id":712,"date":"2017-10-14T16:37:29","date_gmt":"2017-10-14T22:37:29","guid":{"rendered":"http:\/\/www.lightsoftllc.com\/?page_id=712"},"modified":"2017-10-14T18:10:39","modified_gmt":"2017-10-15T00:10:39","slug":"rcwa-algorithm-used-in-gratingmaster-copy","status":"publish","type":"page","link":"http:\/\/www.lightsoftllc.com\/?page_id=712&lang=zh","title":{"rendered":"RCWA — \u4e25\u683c\u8026\u5408\u6ce2\u5206\u6790\uff0cGratingMaster \u7b97\u6cd5"},"content":{"rendered":"

GratingMaster\u00ae\u662f\u7528\u4e8e\u8bbe\u8ba1\u5149\u6805\u7684\u4e13\u4e1a\u5149\u5b66\u8f6f\u4ef6\u5de5\u5177\u3002 \u8bbe\u8ba1\u76ee\u6807\u5149\u6805\u4e3b\u8981\u662f\u5c0f\u5c3a\u5bf8\uff0c\u5149\u6805\u5468\u671f\u5728\u6216\u5c0f\u4e8e\u5149\u6ce2\u957f\u3002<\/p>\n

GratingMaster\u00ae\u6240\u7528\u7684\u7b97\u6cd5\u662f\u4e25\u683c\u8026\u5408\u6ce2\u5206\u6790\uff08RCWA\uff0cRigorous Coupled Wave Analysis\uff09\uff0c\u5b83\u662f\u4e00\u79cd\u901a\u8fc7\u7cbe\u786e\u5206\u6790\u5468\u671f\u6027\u7ed3\u6784\uff08\u5982\u5149\u6805\uff09\u7684\u7535\u78c1\u6ce2\u884d\u5c04\u7684\u6d41\u884c\u7b97\u6cd5\u3002 \u4e25\u683c\u7684\u884d\u5c04\u7b97\u6cd5\u4e3b\u8981\u5e94\u7528\u4e8e\u5177\u6709\u4e0e\u5149\u6ce2\u957f\u76f8\u5f53\u7684\u7279\u5f81\u5c3a\u5bf8\u7684\u5149\u6805\u3002 RCWA\u5df2\u7ecf\u6210\u529f\u5e94\u7528\u4e8e\u5168\u606f\u5149\u6805\u548c\u8868\u9762\u6d6e\u96d5\u5149\u6805\u7684\u5206\u6790\u3002<\/p>\n

RCWA\u9996\u5148\u7531Moharam\u548cGaylord\u4e3a\u5e73\u9762\u5149\u6805\u5236\u5b9a\uff0c\u7136\u540e\u6269\u5c55\u5230\u8868\u9762\u6d6e\u96d5\u5149\u6805\u548c\u4ea4\u53c9\u5149\u6805\u3002 \u5728RCWA\u4e2d\uff0c\u7535\u78c1\u573a\u7684\u77e2\u91cf\u6027\u8d28\u901a\u8fc7\u7cbe\u786e\u6c42\u89e3\u9ea6\u514b\u65af\u97e6\u65b9\u7a0b\u6216\u77e2\u91cf\u6ce2\u65b9\u7a0b\u800c\u65e0\u9700\u4efb\u4f55\u6709\u610f\u4e49\u7684\u8fd1\u4f3c\u6765\u8003\u8651\u3002 \u5728\u5149\u6805\u4ecb\u8d28\u4e2d\u7684\u573a\u53ef\u4ee5\u6269\u5c55\u4e3a\u573a\u5728\u5468\u671f\u6027\u7ed3\u6784\u4e2d\u7684\u7a7a\u95f4\u8c10\u6ce2\u5206\u91cf\u3002 \u5149\u6805\u5185\u7684\u8fd9\u4e9b\u7a7a\u95f4\u8c10\u6ce2\u4e0e\u5149\u6805\u5916\u7684\u884d\u5c04\u7ea7\u76f8\u4f4d\u5339\u914d\u3002 \u5355\u4e2a\u7a7a\u95f4\u8c10\u6ce2\u573a\u5e76\u4e0d\u6ee1\u8db3\u77e2\u91cf\u6ce2\u65b9\u7a0b\uff08\u56e0\u6b64\u4e5f\u4e0d\u6ee1\u8db3\u9ea6\u514b\u65af\u97e6\u65b9\u7a0b\uff09\u3002 \u4f46\u6240\u6709\u7a7a\u95f4\u8c10\u6ce2\u573a\u7684\u603b\u548c\u5219\u6ee1\u8db3\u6ce2\u52a8\u65b9\u7a0b\u3002 RCWA\u6839\u636e\u6bcf\u4e2a\u7ea7\u6570\u7684\u884d\u5c04\u6548\u7387\u7ed9\u51fa\u884d\u5c04\u7ed3\u679c\u3002<\/p>\n

\u4e0eRCWA\u76f8\u6bd4\uff0c\u6807\u91cf\u884d\u5c04\u7406\u8bba \uff08Scalar diffraction theory\uff09\u662f\u5206\u6790\u5177\u6709\u8f83\u5927\u5c3a\u5bf8\u7684\u884d\u5c04\u5149\u5b66\u5143\u4ef6\u7684\u53e6\u4e00\u79cd\u7406\u8bba\uff0c\u5c06\u7535\u78c1\u573a\u7684\u77e2\u91cf\u7279\u5f81\u89c6\u4e3a\u8fd1\u4f3c\u7684\u6807\u91cf\u573a\u3002 \u6807\u91cf\u7406\u8bba\u5bf9\u4e8e\u5404\u79cd\u884d\u5c04\u5143\u4ef6\u662f\u6709\u6548\u7684\uff0c\u5c24\u5176\u5728\u6570\u5b66\u8ba1\u7b97\u4e0a\u6548\u7387\u9ad8\uff0c\u7279\u522b\u662f\u5bf9\u4e8e\u5927\u4e8e\u5149\u6ce2\u957f\u7684\u7279\u5f81\u5c3a\u5bf8\u65b9\u6cd5\u3002<\/p>\n

\u968f\u7740\u5fae\u5236\u9020\u52a0\u5de5\u6280\u672f\u548c\u8ba1\u7b97\u673a\u5efa\u6a21\u6280\u672f\u7684\u53d1\u5c55\uff0c\u5f53\u524dDOE\u7684\u5149\u6805\u5468\u671f\u6216\u7279\u5f81\u5c3a\u5bf8\u4e00\u76f4\u5728\u4e0d\u65ad\u4e0b\u964d\u3002 \u5f53DOE\u7684\u7279\u5f81\u5c3a\u5bf8\u5c0f\u4e8e\u6216\u7b49\u4e8e\u5149\u6ce2\u957f\u65f6\uff0c\u7ecf\u5178\u6807\u91cf\u884d\u5c04\u7406\u8bba\u4e0d\u518d\u6709\u6548\uff0c\u4e0d\u80fd\u5e94\u7528\u4e8e\u8fd9\u4e9b\u5143\u7d20\u7684\u5206\u6790\u548c\u8bbe\u8ba1\u3002 \u5fc5\u987b\u4f7f\u7528\u4e25\u683c\u7684\u7535\u78c1\u884d\u5c04\u6a21\u578b\u6765\u51c6\u786e\u9884\u6d4b\u8fd9\u79cdDOE\u7684\u6027\u80fd\u3002 RCWA \u7b97\u6cd5\u4e25\u683c\u5206\u6790\u9ea6\u514b\u65af\u97e6\u65b9\u7a0b\uff0c\u800c\u65e0\u9700\u4efb\u610f\u8fd1\u4f3c\u3002<\/p>\n

\u5149\u6805 Grating \/ DOE\u7684\u4e00\u822c\u8bbe\u8ba1\u7a0b\u5e8f\uff0c\u5206\u4e09\u4e2a\u9636\u6bb5,<\/strong><\/p>\n

    \n
  1. \u5206\u6790DOE\u8bbe\u8ba1\u95ee\u9898
    \n\u8bbe\u8ba1\u5e08\u9996\u5148\u9700\u8981\u4e86\u89e3DOE\u529f\u80fd\u7684\u7269\u7406\u7279\u6027\uff0c\u5e76\u9009\u62e9\u6240\u9700\u7684\u5236\u4f5c\u5de5\u827a\u3002 \u884d\u5c04\u8bbe\u8ba1\u6a21\u578b\u7684\u9009\u62e9\u4e0e\u7b97\u6cd5\u590d\u6742\u5ea6\u6709\u5173\uff0c\u5982\u4e25\u683c\u5206\u6790\u6216\u6807\u91cf\u7406\u8bba\u3002 \u8003\u8651\u5230\u6700\u5c0f\u7279\u5f81\u5c3a\u5bf8\uff0c\u5236\u9020\u6a21\u578b\u9700\u8981\u89e3\u51b3\u5de5\u827a\u7ec6\u8282\u3002<\/li>\n
  2. \u5c06\u95ee\u9898\u7684\u7269\u7406\u7406\u89e3\u8f6c\u5316\u4e3a\u4f18\u5316\u5b9a\u4e49
    \n\u5176\u6b21\uff0c\u8bbe\u8ba1\u5e08\u5c06\u8bbe\u8ba1\u95ee\u9898\u8f6c\u5316\u4e3a\u4f18\u5316\u95ee\u9898\u3002 \u57fa\u4e8e\u786e\u5b9aDOE\u6027\u80fd\u7684\u7269\u7406\u53c2\u6570\uff0c\u5b9a\u4e49\u4e86\u4e00\u4e9b\u8bbe\u8ba1\u5ea6\u91cf\uff08DOE\u6027\u80fd\u7684\u5ea6\u91cf\uff09\uff0c\u5e76\u5c06\u4e00\u4e9b\u5149\u6805\u51e0\u4f55\u53c2\u6570\u8bbe\u7f6e\u4e3a\u4f18\u5316\u7684\u53d8\u91cf\u3002 \u8bbe\u8ba1\u5ea6\u91cf\u53ef\u4ee5\u7528\u7269\u7406\u53c2\u6570\u6765\u8868\u793a\uff0c\u4f8b\u5982\u6bcf\u4e2a\u5149\u6805\u7ea7\u4e2d\u7684\u884d\u5c04\u6548\u7387\u3002<\/li>\n
  3. DOE\u8bbe\u8ba1\u5b9e\u73b0
    \n\u6700\u540e\u8fdb\u884c\u8bbe\u8ba1\uff0c\u4f18\u5316\u53ca\u5236\u4f5cDOE\u3002 \u5728\u5b9e\u9645\u5e94\u7528\u4e2d\u53ef\u80fd\u53cd\u590d\u51e0\u6b21\u4e0a\u9762\u7684\u6b65\u9aa4\u3002<\/li>\n<\/ol>\n","protected":false},"excerpt":{"rendered":"

    GratingMaster\u00ae\u662f\u7528\u4e8e\u8bbe\u8ba1\u5149\u6805\u7684\u4e13\u4e1a\u5149\u5b66\u8f6f\u4ef6\u5de5\u5177\u3002 \u8bbe\u8ba1\u76ee\u6807\u5149\u6805\u4e3b\u8981\u662f\u5c0f\u5c3a\u5bf8\uff0c\u5149\u6805\u5468\u671f\u5728\u6216\u5c0f\u4e8e\u5149\u6ce2\u957f\u3002 GratingMaster\u00ae\u6240\u7528\u7684\u7b97\u6cd5\u662f\u4e25\u683c\u8026\u5408\u6ce2\u5206\u6790\uff08RCWA\uff0cRigorous Coupled Wave Analysis\uff09\uff0c\u5b83\u662f\u4e00\u79cd\u901a\u8fc7\u7cbe\u786e\u5206\u6790\u5468\u671f\u6027\u7ed3\u6784\uff08\u5982\u5149\u6805\uff09\u7684\u7535\u78c1\u6ce2\u884d\u5c04\u7684\u6d41\u884c\u7b97\u6cd5\u3002 \u4e25\u683c\u7684\u884d\u5c04\u7b97\u6cd5\u4e3b\u8981\u5e94\u7528\u4e8e\u5177\u6709\u4e0e\u5149\u6ce2\u957f\u76f8\u5f53\u7684\u7279\u5f81\u5c3a\u5bf8\u7684\u5149\u6805\u3002 RCWA\u5df2\u7ecf\u6210\u529f\u5e94\u7528\u4e8e\u5168\u606f\u5149\u6805\u548c\u8868\u9762\u6d6e\u96d5\u5149\u6805\u7684\u5206\u6790\u3002 RCWA\u9996\u5148\u7531Moharam\u548cGaylord\u4e3a\u5e73\u9762\u5149\u6805\u5236\u5b9a\uff0c\u7136\u540e\u6269\u5c55\u5230\u8868\u9762\u6d6e\u96d5\u5149\u6805\u548c\u4ea4\u53c9\u5149\u6805\u3002 \u5728RCWA\u4e2d\uff0c\u7535\u78c1\u573a\u7684\u77e2\u91cf\u6027\u8d28\u901a\u8fc7\u7cbe\u786e\u6c42\u89e3\u9ea6\u514b\u65af\u97e6\u65b9\u7a0b\u6216\u77e2\u91cf\u6ce2\u65b9\u7a0b\u800c\u65e0\u9700\u4efb\u4f55\u6709\u610f\u4e49\u7684\u8fd1\u4f3c\u6765\u8003\u8651\u3002 \u5728\u5149\u6805\u4ecb\u8d28\u4e2d\u7684\u573a\u53ef\u4ee5\u6269\u5c55\u4e3a\u573a\u5728\u5468\u671f\u6027\u7ed3\u6784\u4e2d\u7684\u7a7a\u95f4\u8c10\u6ce2\u5206\u91cf\u3002 \u5149\u6805\u5185\u7684\u8fd9\u4e9b\u7a7a\u95f4\u8c10\u6ce2\u4e0e\u5149\u6805\u5916\u7684\u884d\u5c04\u7ea7\u76f8\u4f4d\u5339\u914d\u3002 \u5355\u4e2a\u7a7a\u95f4\u8c10\u6ce2\u573a\u5e76\u4e0d\u6ee1\u8db3\u77e2\u91cf\u6ce2\u65b9\u7a0b\uff08\u56e0\u6b64\u4e5f\u4e0d\u6ee1\u8db3\u9ea6\u514b\u65af\u97e6\u65b9\u7a0b\uff09\u3002 \u4f46\u6240\u6709\u7a7a\u95f4\u8c10\u6ce2\u573a\u7684\u603b\u548c\u5219\u6ee1\u8db3\u6ce2\u52a8\u65b9\u7a0b\u3002 RCWA\u6839\u636e\u6bcf\u4e2a\u7ea7\u6570\u7684\u884d\u5c04\u6548\u7387\u7ed9\u51fa\u884d\u5c04\u7ed3\u679c\u3002 \u4e0eRCWA\u76f8\u6bd4\uff0c\u6807\u91cf\u884d\u5c04\u7406\u8bba \uff08Scalar diffraction theory\uff09\u662f\u5206\u6790\u5177\u6709\u8f83\u5927\u5c3a\u5bf8\u7684\u884d\u5c04\u5149\u5b66\u5143\u4ef6\u7684\u53e6\u4e00\u79cd\u7406\u8bba\uff0c\u5c06\u7535\u78c1\u573a\u7684\u77e2\u91cf\u7279\u5f81\u89c6\u4e3a\u8fd1\u4f3c\u7684\u6807\u91cf\u573a\u3002 \u6807\u91cf\u7406\u8bba\u5bf9\u4e8e\u5404\u79cd\u884d\u5c04\u5143\u4ef6\u662f\u6709\u6548\u7684\uff0c\u5c24\u5176\u5728\u6570\u5b66\u8ba1\u7b97\u4e0a\u6548\u7387\u9ad8\uff0c\u7279\u522b\u662f\u5bf9\u4e8e\u5927\u4e8e\u5149\u6ce2\u957f\u7684\u7279\u5f81\u5c3a\u5bf8\u65b9\u6cd5\u3002…<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_mi_skip_tracking":false},"_links":{"self":[{"href":"http:\/\/www.lightsoftllc.com\/index.php?rest_route=\/wp\/v2\/pages\/712"}],"collection":[{"href":"http:\/\/www.lightsoftllc.com\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"http:\/\/www.lightsoftllc.com\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"http:\/\/www.lightsoftllc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.lightsoftllc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=712"}],"version-history":[{"count":2,"href":"http:\/\/www.lightsoftllc.com\/index.php?rest_route=\/wp\/v2\/pages\/712\/revisions"}],"predecessor-version":[{"id":736,"href":"http:\/\/www.lightsoftllc.com\/index.php?rest_route=\/wp\/v2\/pages\/712\/revisions\/736"}],"wp:attachment":[{"href":"http:\/\/www.lightsoftllc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=712"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}